VUV and EUV Detectors-GaNo Optoelectronics Inc.

UV Sensors

GaN UV sensors

SiC UV Sensors

SiC Single Photon Counting UV Photodiode

VUV and EUV Detectors

UV Sensor Probe for Water Treatment

UV Sensor Probe for UV Curving Process

UV Sensing Module

UV Related Testing and Calibration Service

VUV and EUV Detectors

New generation SiC-based vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) detectors have many advantages over their Si-based counterparts, including low dark current, high quantum efficiency, visible blind, good temperature stability and radiation-hard. They are excellent candidate devices for 193 nm/13.5 nm UV light source monitoring, synchrotron radiation monitoring and calibration, solar wind observation, geoplasma physics study as well as high precision industrial measurement.

Model：ST-VUV1

Product info：chip size 1 mm2, TO46 metal package, high quantum efficiency and low dark current, high stability and radiation hard

Typical applications： 193 nm excimer laser output monitoring, VUV synchrotron light source monitoring, VUV power meter, VUV spectrometer

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Model：ST-VUV6

Product info：chip size 6.25 mm2, TO39 metal package, high quantum efficiency and low dark current, high stability and radiation hard

Typical applications： 193 nm excimer laser output monitoring, VUV synchrotron light source monitoring, VUV power meter, VUV spectrometer

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Model：ST-VUV25

Product info：oversized sensing area, chip size 25 mm2, TO8 metal package, high quantum efficiency and low dark current, high stability and radiation hard

Typical applications： 193 nm excimer laser output monitoring, VUV synchrotron light source monitoring, VUV power meter, VUV spectrometer

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Model：ST-EUV6

Product info：chip size 6.25 mm2, windowless TO39 metal package, high quantum efficiency and low dark current, high stability and radiation hard

Typical applications： 13.5 nm EUV radiation monitoring, EUV synchrotron light source monitoring, EUV power meter, EUV spectrometer

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Model：ST-EUV25

Product info：oversized sensing area, chip size 25 mm2, windowless TO8 metal package, high quantum efficiency and low dark current, high stability and radiation hard

Typical applications： 13.5 nm EUV radiation monitoring, EUV synchrotron light source monitoring, EUV power meter, EUV spectrometer

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Model：SCT-EUV20

Product info：chip size19.6 mm2,ceramic package,extreme ultraviolet detection, high stability and radiation hard

Typical applications： 13.5 nm EUV radiation monitoring, EUV synchrotron light source monitoring, EUV power meter, EUV spectrometer

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Model：SCT-EUV64

Product info：chip size63.5mm2, ceramic package,extreme ultraviolet detection, high stability and radiation hard

Typical applications： 13.5 nm EUV radiation monitoring, EUV synchrotron light source monitoring, EUV power meter, EUV spectrometer

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Model：SCT-VUV20

Product info：chip size19.6 mm2, ceramic package，vacuum ultraviolet detection, high stability and radiation hard

Typical applications： 193 nm excimer laser output monitoring, VUV synchrotron light source monitoring, VUV power meter, VUV spectrometer

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Model：SCT-VUV64

Product info：chip size63.5 mm2, ceramic package，vacuum ultraviolet detection, high stability and radiation hard

Typical applications： 193 nm excimer laser output monitoring, VUV synchrotron light source monitoring, VUV power meter, VUV spectrometer

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